Plasma treatment for ceramic materials

ABSTRACT

An etching and fluorinating treatment is disclosed for modifying the surface properties of magnetic data storage media and sliders for magnetic data transducing heads. Media enclosed within a plasma chamber is first exposed to an argon plasma for cleaning, then exposed to a plasma mixture including argon with either fluorine or carbon tetrafluoride, maintained at a pressure of approximately half of atmospheric pressure, at a temperature of about 100° C. An electrical field is generated for forming argon, carbon and fluorine ions. The argon ions etch the carbon overcoat of the disc, while the carbon and fluorine ions combine with the carbon to form extended chain fluoropolymers, and also penetrate the carbon layer. Sliders are treated in a plasma mixture of argon and CF 4 . During such treatment, carbon and fluorine ions penetrate exposed surface areas of the slider, and form a reaction product of solid lubricant film. In connection with both processes, ion penetration and reaction product formation reduce surface energy and strengthen cohesive bonding. The formation of a solid lubricant of extended chain fluoropolymers improves lubricity.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation-in-part of application Ser. No. 07/166,215, filed Mar. 10, 1988, and entitled SURFACE TREATMENT FOR SLIDERS AND CARBON COATED MAGNETIC MEDIA now U.S. Pat. No. 4,863,809.

BACKGROUND OF THE INVENTION

This invention relates to magnetic data storage and retrieval apparatus, and more particularly to processes for improving the surface properties of magnetic discs or other media, and of sliders for magnetic reading and recording transducers.

The employment of selected surface coatings and other treatments is a well known technique for enhancing the useful life and reliability of magnetic media and sliders of magnetic data reading and recording heads. Magnetic discs and sliders are subject to wear along their interfaces or areas of mutual surface engagement as they are moved relative to one another. Even in disc drives employing "flying" heads which normally are separated from the disc by a thin air foil, the surface contact during repeated starts and stops of disc rotation can cause substantial wear to the interfacing surfaces, and eventually can lead to a head crash.

Accordingly, surfaces of sliders and discs frequently are treated to increase their toughness and strength, and to reduce friction. For example, in U.S. Pat. No. 4,251,297 (Kawabata) a boronized layer is formed on the surface portion of a slider disposed to contact the magnetic recording medium. U.S. Pat. No. 4,631,613 (French) discloses a plasma process for improving the saturization magnetization of the transducer. In particular, a gap spacer material and a pole piece are deposited using an Alfesil target along with either argon or nitrogen gas.

In connection with a device in which the slider is normally in contact with a magnetic tape or disc, a technique to improve the slideability between a disc and slider is disclosed in U.S. Pat. No. 4,649,488 (Nakajima). The sliding surface of a head is coated with a zirconium oxide or other material having a high coefficient of thermal expansion, in particular high enough to carbonize the binder of the recording medium.

U.S. Pat. No. 4,619,861 (Nakayama) discloses a plasma polymerization technique for coating the particles which make up magnetic powders. The technique is said to improve the disperseability, squareness ratio and dusting of the magnetic powders. Another known approach is to provide a passivation layer of sputtered carbon over the magnetic media or recording layer of a disc, both to protect the media layer against corrosion and to improve surface lubricity. The carbon overcoat is quite thin, typically in the range of 300 to 400 Angstroms, and as formed, includes micro-pores and sometimes "pinholes" exposing the media layer. Another problem encountered with the carbon overcoat is a build-up of debris, principally carbon particles, on the disc surface. The slider, due to high surface energy, tends to pick up this debris, leading ultimately to a head crash.

Therefore, it is an object of the present invention to provide a treatment for ceramic materials to reduce surface friction and improve the hardness and toughness of the surfaces of such materials.

Another object of the invention is to provide a slider with an interfacing surface of improved toughness, hardness and lubricating characteristics, and reduced surface energy.

Another object of the invention is to provide a process for surface treatment of head sliders for use with magnetic media, to improve the surface properties of such sliders.

Yet another object is to provide sliders having reduced friction at the interface with magnetic media, thereby to reduce noise due to friction and increase signal quality.

SUMMARY OF THE INVENTION

To achieve these and other objects, there is provided a slider for magnetic data transducing heads. The slider body consists essentially of a ceramic material and has a flat interfacing surface. A penetration of fluorine ions is formed into the slider body beneath the interfacing surface, to provide an outer layer of the slider body, including and adjacent the interfacing surface, consisting essentially of the fluorine ions and the ceramic material.

Preferably, the outer layer further includes polymeric solid lubricants at least along the interfacing surface, and a fluorine ion penetration is formed to a controlled and predetermined depth beneath the interfacing surface.

A further aspect of the present invention is a process for treating an exposed surface of a slider body formed of a ceramic material. With the slider body in a plasma chamber, an inert gas plasma is maintained in the chamber at a pressure substantially less than atmospheric pressure, generally at ambient temperature, and for a selected amount of time to etch the slider, particularly over an exposed interfacing surface. Following etching, a plasma mixture is maintained within the chamber at a pressure substantially less than atmospheric pressure and at about 100° C., and for a selected amount of time to enable fluorine ion implantation to at least a selected depth beneath the interfacing surface. The plasma mixture consists essentially of carbon tetraflouride (CF₄) and an inert gas, with the CF₄ comprising at least sixty percent of the mixture by volume. A six hundred watt power source creates the charge or voltage differential between a pair of electrodes associated with the plasma chamber in order to produce the plasma mixture, and the inert gas (e.g. Argon) plasma in the etching step.

As a result of this treatment, a fluoropolymeric thin film is formed along the exposed surfaces of the slider. Ion implantation substantially increases the cohesive bonding strength of the ceramic material molecules throughout the film and deep into the substrate. Moreover, it is believed that extended chain polymers such as hexafluoroethane are formed along the slider surface to improve lubricity. Further polymeric solid lubricants are believed to be formed, depending on the ceramic: e.g. calcium fluoride when sliders include calcium titanate or calcium oxide as a constituent, and titanium tetrafluoride for sliders composed at least partially of calcium titanate or titanium oxide. Lubricants formed in the case of nickel zinc and aluminum oxide sliders are believed to include nickel difluoride and aluminum trifluoride, respectively.

The fluorine ions react with the surface and form a carbon-fluorine film which reduces surface energy and therefore reduces debris pick-up by the slider. Fewer particles are generated due to the increased impact strength and better lubricity of media and slider surfaces. Reduced friction also means reduced noise due to friction, for an enhanced data signal. Accordingly, employing the disclosed processes lead to reduced incidents of head crash for longer useful life of the data storage system, and further enhance signal quality.

IN THE DRAWINGS

For a better appreciation of the foregoing and other features and advantages, reference is made to the following detailed description and drawings, in which:

FIG. 1 is a sectional view of part of a magnetic data storage disc provided with a known carbon overcoat;

FIG. 2 is an enlarged partial view of FIG. 1;

FIG. 3 is a schematic representation of a plasma treatment apparatus;

FIG. 4 is a sectional view of the magnetic medium in FIG. 1, after treatment in accordance with the present invention;

FIG. 5 is an enlarged partial view of FIG. 4;

FIG. 6 is a perspective view of a ceramic slider; and

FIG. 7 is an end view of the slider, following treatment in accordance with the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Turning now to the drawings, there is shown in FIG. 1 a section of a magnetic data storage disc 16, formed by selectively layering a substrate 18 preferably formed of aluminum. A layer 20 consists of nickel, plated on substrate 18 by an electroless process. Nickel layer 20 has a high degree of surface roughness and therefore is polished to a thickness of approximately 400 micro inches (i.e. 10⁵ Angstroms). Next, a layer 22 of chrome is deposited on the nickel layer by sputtering, to a thickness of about 10 Angstroms. A recording layer 24 then is sputtered onto the chrome layer, to a thickness of about 200-300 Angstroms. Recording layer 24 is formed of a magnetizable material typically including nickel/iron and nickel/cobalt alloys, which also may include chrome. In lieu of sputtering, recording layer 24 in some cases is formed by plating. Finally, a carbon layer 26 having a thickness of about 300-400 Angstroms is deposited onto the recording layer by sputtering.

Carbon layer 26 is provided to protect recording layer 24 against corrosion, and also to provide lubricity, thereby to reduce friction between disc 16 and a slider 28 of a magnetic data transducing head. Slider 28 is shown in its normal operating position, supported approximately 10 micro inches above the disc by an air foil generated by disc rotation. Thus, while surface contact friction is not present during operation, repeated starting and stopping of the disc involves slider/disc contact, such that friction can damage slider 28, disc 16 or both.

In addition to providing corrosion protection and lubrication, carbon layer 26 should be as smooth as possible to provide the desired narrow air foil gap or flying height. The utility of a data storage system employing disc 16 and slider 28 resides largely in the density of data storage. Generally, density increases as the gap between slider 28 and recording layer 24 is reduced. Therefore, it is advantageous to minimize the thickness of carbon layer 26 as well as the flying height.

As seen from the enlarged view in FIG. 2 showing only layers 24 and 26, outer layer 26 of carbon is not smooth, but forms numerous peaks 30, depressions or valleys 32, and pinholes 34 which leave recording layer 24 exposed to damage, particularly due to moisture. Depositing a sufficient thickness of carbon to remove pinholes 34 increases the thickness of the carbon layer and therefore undesirably enlarges the gap between the slider and recording layer. Of course, the flying height of slider 28 must be sufficient to avoid peaks 30, and therefore the effective thickness of carbon layer 26 is equal to the height of the peaks.

The surface roughness of carbon layer 26 contributes to the friction between the disc and slider. Furthermore the carbon layer, particularly at peaks 30, is susceptible to fretting or fracturing from disc/slider contact. The result is a build-up of debris consisting mainly of carbon particles, which are picked up by the slider. Build-up of such debris on the slider eventually leads to a head crash.

To smooth and toughen carbon layer 26 and to improve its lubricity, disc 16 is treated with apparatus including a fluid tight plasma chamber 36 schematically illustrated in FIG. 3. While just disc 16 is shown in the chamber, it is to be understood that chamber 36 can be of a sufficient size to accommodate many discs.

The apparatus further includes an exhaust pump 38 in fluid communication with chamber 36 for evacuating the chamber when desired. Also in fluid communication with the chamber, through lines 41 and 43 respectively, are first and second containers 40 and 42. Containers 40 and 42 respectively comprise a supply of an inert gas such as argon, and a reactive gas such as carbon tetrafluoride (CF₄). Other gases can be used, e.g. fluorine (F₂) as the reactive gas and nitrogen or oxygen in lieu argon. Valves 44 and 46 control, respectively, the supply of argon and CF₄ to the chamber. A power supply 48 biases an electrode 50 with respect to a grounded electrode 52 to generate the electrical field necessary to ionize gases contained in chamber 36.

To treat disc 16, exhaust pump 38 is actuated to substantially evacuate chamber 36. After evacuation, valve 44 is opened to supply argon to the chamber, with none of the reactive gas being supplied at this point. Argon is supplied to the chamber until pressure within the chamber is about 250 millitorr. Then, power at six hundred watts is supplied to electrode 50 to generate an electrical field and ionize the argon, forming an argon plasma within chamber 36. Etching/cleaning proceeds at a temperature of about 100° C. commonly referred to as low temperature plasma.

The argon plasma is maintained in the chamber for approximately ten minutes, depending upon the load. The argon plasma cleans and etches the exposed surfaces of carbon layer 26, particularly in removing or diminishing peaks 30. This etching process, however, has the undesirable effect of increasing the surface energy of the carbon layer.

Accordingly, disc 16 is subject to a further plasma process. Chamber 36 again is evacuated, whereupon valves 44 and 46 are opened to permit a mixture of argon and CF₄ to enter the chamber. Valves 44 and 46 are controlled, either in the comparative length of time degree to which they are opened, to provide a mixture which is at least sixty percent, by volume, of CF₄. Preferably the percentage of reactive gas is in the range of seventy-five to eighty-five percent, with a particularly preferred mixture being eighty percent CF₄ and twenty percent argon. The argon and CF₄ are permitted to enter the chamber until pressure within the chamber is in the range of from 200-400 millitorr, and preferably at about 350 millitorr. In general, higher pressure enhances ion penetration, while lower pressure improves plasma flow. Power at six hundred watts is supplied to electrode 50, and the plasma process proceeds at approximately 100° C. The preferred exposure time has been found to be twenty-five to thirty minutes, depending upon the area and materials.

During this treatment, conditions inside chamber 36 become increasingly favorable for reactions of the fluorine ions with carbon, thus to form extended chain fluoropolymers along and beneath exposed surfaces of carbon layer 26. In particular, when carbon tetrafluoride is the reactive gas, or when fluorine is the reactive gas and after interaction with the carbon layer, one or more of the following reactions is believed to occur:

    ______________________________________                                                6CF.sub.4 + 2C 4C.sub.2 F.sub.6                                                CF.sub.4 + C   C.sub.2 F.sub.4                                                 2CF.sub.4 + 4C 2C.sub.3 F.sub.4                                         ______________________________________                                    

Thus, one or more of the above fluoropolymers, namely hexafluoroethane, tetrafluoroethylene and tetrafluoropropylene, are believed formed over the surface of the carbon layer, and into the carbon layer to a depth which increases with the time of exposure in the plasma chamber. In effect, at least a portion of the carbon layer is fluorinated, with that portion of the carbon being altered to a thin film of carbon and extended chain fluoropolymers.

Oxygen or nitrogen can be supplied to chamber 36 in lieu of argon, resulting in the formation of further fluoropolymers, it is believed, in accordance with the following reactions:

    ______________________________________                                         2CF.sub.4 + O.sub.2 2CF.sub.4 O                                                5CF.sub.4 + 2N.sub.2                                                                               4CF5N + C                                                  ______________________________________                                    

Thus, the addition of oxygen, preferably at twenty to thirty percent of the plasma mixture by volume, is believed to form tetrafluoromethylaldehyde along the exposed surfaces of carbon layer 26. Similarly, provision of nitrogen at about twenty to thirty percent of the mixture results in formation of pentafluoroaminomethane.

Due to the superior bonding strength of the extended chain fluoropolymers, the fluorinated carbon film has a greater surface fatigue and fretting strength than the untreated carbon layer. Further, fluorinated carbon film reduces slider/disc friction due to improved lubricity, as these polymers act as solid lubricants.

In addition to their part in forming extended chain fluoropolymers, carbon and fluorine ions generated during the plasma process become implanted in the carbon layer, particularly in micro-pores, defects, valleys 32 and pinholes 34, thus filling in the pinholes to provide a positive protection against moisture penetration. In combination with the etching action of the argon in removing or reducing peaks 30, this ion implanting thus tends to smooth the surface carbon layer 26. Yet another benefit of the combined ion implantation and reaction product is a lower surface energy of carbon layer 26, thus reducing the chance of surface contamination, enhancing surface lubricity and preventing corrosion.

A segment of disc 16 after treatment is shown in FIG. 4, and in greater detail in FIG. 5. While much of carbon layer 26 remains in its original form, a fluorinated carbon film 56 has formed which consists of carbon and the above-mentioned extended chain fluoropolymers. Asperities or peaks in the original carbon layer have been reduced or removed by the argon etching, while the micro-pores, defects, valleys and pinholes have been at least partially filled by the implantation of ions. Consequently, carbon layer 26 as treated is substantially smoother than the original carbon layer. The overall surface energy is reduced, as the ion implantation and the reaction product film on the surface reduces surface energy and overcomes the tendency of argon etching to increase the surface energy. The increased smoothness of course further reduces friction. The accompanying reduction of noise due to friction enhances the signal generated in the transducing head, in particular the signal to noise ratio. Due to the nature of the bonding of the fluoropolymers, the elasticity and damping characteristics of the surface are also improved.

FIG. 6 shows a transducing head including a slider 60 and a ferrite core 62 glass bonded on the slider. Slider 60 is of the catamaran type, including a main body 64 and two parallel skis 66 and 68. Top surfaces of the skis 70 and 72 together comprise the interfacing surface of slider 60 which contacts discs such as disc 16 during the starting and stopping of disc rotation. Slider 60 is constructed of a ceramic material such as calcium titanate, NiZn ferrite, barium titanate, MnZn ferrite or Alsimag (Al₂ O₃ +TiC).

The surface characteristics of slider 60, particularly along surfaces 70 and 72, can be enhanced by treating slider 60 in processes similar to those described in connection with disc 16. In particular, slider 60 or a multiplicity of similar sliders can be contained in chamber 36 in an argon plasma environment similar to that previously described, except that the time preferred is fifteen to twenty-five minutes.

In the fluorinating process, argon remains the preferred inert gas while the reactive gas is only carbon tetrafluoride.

The process described above in connection with disc 16 can be employed to improve the surface properties of slider 60. More particularly, one or more sliders can be placed in chamber 36 for argon plasma etching, followed by treatment with the plasma gas mixture of argon and carbon tetrafluoride. Again, the CF₄ should comprise at least sixty percent of the plasma mixture, with a preferred range being seventy-five to eighty percent and eighty percent being the highly preferred amount. The etching and fluorinating treatment processes both take place at about 100° C. The pressure during fluorine treatment again is 200-400 millitorr, preferably 350 millitorr.

While the treatment of magnetic media and magnetic head sliders is similar, the desired results in each case occur for different reasons. In particular, formation of extended chain fluoropolymers on the carbon layer of disc 16, improves lubricity, and is a primary benefit of the plasma treatment for media. With sliders, by contrast, the primary benefit of the treatment appears to be the reduced surface energy and increased surface toughness, both of which occur as a result of combined ion implantation and reaction product formation. Consequently, the optimum fluorinating treatment time for sliders is largely a function of the desired depth of ion penetration. Penetration depth has been found to be about 250 Angstroms with an exposure time of forty-five minutes.

Exposure time is but one of three factors influencing the depth below the exposed surfaces of skis 70 and 72, to which fluorine ions penetrate. The extent of penetration depends on the kinetic energy of the particles, which is proportional to the square of particle velocity. Thus, increasing the power applied during the plasma process, to levels above 600 watts, increases the penetration depth above 250 angstroms, assuming the process time is again 45 minutes. Likewise, reducing the power level reduces penetration depth. Argon pressure within the chamber also influences penetration, in the sense that there is a permitted range or "window" of argon pressures at which penetration can occur. Increasing the process time of course increases penetration depth, since the kinetic energy increases with time.

The precise relationships determining the influence on penetration depth by each of the three variables, or from any combination of the variables, is not fully understood. Regardless of which variables are involved, the relationship is asymtotic in the sense that there is a maximum penetration depth that is not surpassed, even in the event of substantial increases in time, applied power or both. Further, the precise manner in which of the factors influences ion penetration depth can vary with the nature of the plasma chamber or other deposition equipment. Nonetheless, the depth of ion penetration can be controlled or predetermined within a limited range by varying one or more of the above factors, principally the applied power and process time.

The depth of ion penetration can be analyzed following the plasma process, using Auger electronic spectroscopy, electron spectroscopy, chemical analysis or depth profiling techniques. Thus, for given plasma disposition equipment, one or more of the depth controlling parameters may be adjusted, if desired, subsequent to an analysis of sliders or other ceramic material previously subjected to the plasma process.

Further, it has been found for example in the case of calcium titanate sliders and nickel zinc ferrite sliders that the optimum exposure time is about twenty-five minutes. With increased exposure beyond twenty-five minutes, the argon etching effect appears to detrimentally offset the benefits of deposition of a fluorinated layer.

By lowering surface energy, due to combined effect of ion penetration and reaction product film on the surface, the amount of debris pick-up by the slider during normal operation is considerably reduced. This treatment improves the cohesive bonding of the slider ceramic as well, thus increasing the slider surface toughness and reducing friction. All these factors contribute to longer life of the data recording system.

Formation of extended chain fluoropolymers and other polymeric solid lubricants is believed to be present, though not as important a factor as in the case of magnetic media. For example, in the case of a calcium titanate slider, the following reaction is believed to occur:

    CaTiO.sub.2 +CF.sub.4 →CaF.sub.2 +TiF.sub.2 +CO.sub.2

Thus, as indicated in FIG. 7, the plasma treatment forms a polymerized layer 74 at the surface of slider 60, particularly at surfaces 70 and 72, characterized by ion implantation to a controlled or predetermined depth as indicated by the broken line, and formation of extended chain fluoropolymers and other polymeric solid lubricants at least along the upper surfaces of skis 70 and 72. The lubricants enhance the lubricity of slider 60. In particular, when a treated slider and a treated disc are used in combination, the friction at low load is reduced by thirty-three to forty percent.

The plasma cleaning and fluorinating treatments, when applied to magnetic media and sliders, substantially enhance the useful life and performance of magnetic data reading and recording devices. The respective treated surfaces show greater strength and toughness, along with lower surface energy and thus a reduced affinity for pick-up of debris. Surface lubricity, particularly for the media, is enhanced by the extended chain fluoropolymers which provide a solid lubricant. Such formation is believed to enhance slider lubricity as well, although the primary improvements in slider surface properties arise from ion penetration. 

What is claimed is:
 1. A slider for magnetic data transducing heads, said slider comprising:a slider body consisting essentially of a ceramic material and having a substantially flat interfacing surface, and a penetration of fluorine ions into said slider body beyond said interfacing surface, whereby an outer layer of said slider body, including and adjacent said interfacing surface, consists essentially of said ions and said ceramic material.
 2. The slider of claim 1 wherein:said outer layer further includes fluoropolymeric solid lubricants at least along said interfacing surface.
 3. The slider of claim 2 wherein:said fluorine penetration extends beyond said interfacing surface by a predetermined distance.
 4. The slider of claim 1 formed by a process including the steps of:enclosing the slider body within a plasma chamber; generating and maintaining within the plasma chamber an inert gas plasma at a pressure substantially less than atmospheric pressure, generally at 100° C., and for an amount of time selected to substantially etch said interfacing surface; and following said etching, generating and maintaining within said chamber a plasma mixture at a selected pressure substantially less than atmospheric pressure, generally at a temperature of about 100° C., for a selected amount of time and with an electric field generated at a selected strength of at least six hundred watts, to form said penetration of fluorine ions to a predetermined depth, wherein the plasma mixture consists essentially of carbon tetrafluoride and an inert gas, with said carbon tetrafluoride comprising at least sixty percent, by volume, of said mixture.
 5. The slider of claim 3 wherein:said predetermined depth is at least 250 angstroms.
 6. The slider of claim 1 further including:a core formed of a magnetic material and bonded to the slider body.
 7. The slider of claim 1 wherein:said ceramic material is a magnetic ceramic material. 